durusmail: mems-talk: Selective Oxide Etch and other random etch rate requests
Selective Oxide Etch
2004-10-13
Kishore Sundara-Rajan
2004-10-14
Peter Andreas Rasmussen
2004-10-14
lrabieir@purdue.edu
Selective Oxide Etch and other random etch rate requests
2004-10-14
Jim Beall
2004-10-21
David Springer
Selective Oxide Etch and other random etch rate requests
Jim Beall
2004-10-14
On Oct 14, 2004, at 10:39 AM, lrabieir@purdue.edu wrote:

> Hi,
> Would you please tell me the etch rate of Si-Nitride in BHF?

A good resource is:

http://mitghmr.spd.louisville.edu/lutz/resources/tables/
Wet_Etch_Table.html

http://mitghmr.spd.louisville.edu/lutz/resources/tables/
Dry_Etch_Table.html


-Jim Beall
303-497-5989
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