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>From: µ£ÄQ¹Å 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] TaN
>Date: Tue, 12 Oct 2004 19:36:07 +0800
>
>Dear all,
>             Anyone can tell me the Young's modulus of Tantalum nitride?
>             Or any textbook can find this data?
>          Thanks
>           Rasheed
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