durusmail: mems-talk: wafer bonding
wafer bonding
2004-10-27
2004-10-29
2004-10-28
2004-10-28
2004-10-28
2004-10-29
wafer bonding
Danielq k
2004-10-27
Hi all
 Any one know how to bond two si wafers? what requirement in term of
heat, vacuum, chemical clean..
Thanks
Daniel

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