Hello all,

I need to use SU-8 as a masking layer in R.T. KOH etching of silicon for
3-4 hours. Is this possible or would I have the same adhesion problems
associated with 70-90 C KOH etching ?

I also need to know how many hours SU-8 can resist 10 wt% HF. Is this also
a adhesion issue or will HF really attack SU-8 and if so, with what etch
rate?

Finally, Does anyone have a number on SU-8 electrical resistivity?

Thanks in advance

--
Srinivas Parimi
Research Assistant
Center for Microelectronics Sensors & MEMS  (CMSM)
372 ERC
University of Cincinnati
Cincinnati OH 45221
(513) 556 4795
Fax: (513) 556 7326
sparimi@ececs.uc.edu
http://www.mems.uc.edu