Hi Daniel,

Have a look at:

Semiconductor Wafer Bonding, Q.-Y. Tong & U. Goesele, ISBN 0-471-57481-3

This should answer all your questions.

Reiner

<[ -----Original Message-----
<[ From: Danielq k [mailto:danielqk@gmail.com]
<[ Sent: Wednesday, October 27, 2004 3:27 PM
<[ To: mems-talk@memsnet.org
<[ Subject: [mems-talk] wafer bonding
<[
<[
<[ Hi all
<[  Any one know how to bond two si wafers? what requirement in term of
<[ heat, vacuum, chemical clean..
<[ Thanks
<[ Daniel
<[
<[