durusmail: mems-talk: Re: Is LPCVD oxide film really conformal
Morphology of sputtered film
2004-11-07
FENG Chun Hua
2004-11-07
Isaac Wing Tak Chan
Is LPCVD oxide film really conformal
2004-11-08
X. Yuan
Re: Is LPCVD oxide film really conformal
2004-11-08
X. Yuan
2004-11-09
WALTER Harald
Re: Is LPCVD oxide film really conformal
X. Yuan
2004-11-08
The dep temperature should be 920C, not 950C.



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