Kevin,

I have a bad experience. When I did TMAH etching at 40C, I used a Al foil to
cover the 2000ml beaker in order to keep the temperature stabe. Finally, the
foil turn grey (black) and lots of dusts drop off into solution. I guess the
TMAH evapor oxide al. but i am not sure.

Good luck,

Lydia


Quoting Kevin Duan :

> Hi, dear all
>
> I am planning to do TMAH etching of silicon wafer with aluminum
> pattern on it.  I want to achieve as low etch rate for Al as possible.
>  Some people add some silicon powder and some other additive, like
> amonium nitrate to do that.  Does anyone have some experience in doing
> so?  How about the experimental setup and the condition?
>
> Thanks ahead.
>
> Duan
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