durusmail: mems-talk: 100nm metal patterning
100nm metal patterning
2004-11-28
100nm metal patterning
Peter Ayliffe
2004-11-28
Hello all,

I am looking for a supplier to pattern a single metal layer on top of
silica wafers.

The details are:

Substrate:                     Silica wafer
Metal:                           Chrome or aluminium
Metal thickness:            100nm
Feature size:                 100nm tracks, 100nm gaps

Does anyone know of a supplier with this capability?  I don't mind how
the metal is patterned.  So far I have made enquiries about dry etch and
ion-beam milling, but the small feature size is a problem for these
techniques.

Regards

Peter Ayliffe
Mesophotonics Limited
Chilworth Business Incubator
2 Venture Road
Chilworth Science Park
Southampton SO16 7NP

Tel:   +44 (0)23 8076 3752
Fax:  +44 (0)23 8076 3757

peter.ayliffe@mesophotonics.com


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