durusmail: mems-talk: Re: SEM Based e-beam Litho Questions
Re: SEM Based e-beam Litho Questions
Re: SEM Based e-beam Litho Questions
Kiyotaka Mori
1998-12-23
J.C.Nabity has Nanometer Pattern Generation System(EB lithography),
703-719-0919.

Good luck.


On Wed, 9 Dec 1998, Ken Westra wrote:

> We are looking to purchase a SEM and an attachment for doing e-beam
> litho. I am new to this work and was looking for advice, suggestions,
> stories, who to talk to, etc. Any help is appreciated.
>
>     Thanks,
>      Ken Westra
>
>

============================================
Kiyotaka Mori (Graduate Student)

Dept. of Materials and Nuclear Engineering,
BLDG. 090, Room 1128
University of Maryland at College Park,
College Park, MD 20742
Tel: 301-405-5229
Fax: 301-314-9467
E-mail: mori@eng.umd.edu
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