Hi,=20
=20
The properties of the deposited Teflon-like film depends on the =
condition used in the DRIE machine, even the machine itself. From my =
experience,the power and flow rate of C4F8 are quite important. The film =
is characterized by a disordered but cross-linked polymer.=20
=20
I did not aneal the film after the passivation. But i feel that, since =
the different expansion coefficient of the film and silicon are =
different, they may break cohesively if the temperature is too high.
=20
It seems that the film can resist the Acetone; but i did not measure the =
duration of that. One effective chemical to remove it is Piranha. =20
=20
You may read a paper=20
D. A.Brevnov, M. J. Barela, M. J. Brooks, G. P. Lopez, P. B. Atanassov, =
J ElectroChem. Soc., 2004, 151, B484-B489. , although the material is =
not silicon.
=20
Good luck
=20
Best Regards
Guo Xun
________________________________
From: Eric J. Correa [mailto:ejcorrea@uiuc.edu]
Sent: Wed 12/1/2004 6:10 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] PTFE Deposition on Si
Hi:
I am trying to deposit PTFE monolayer on Si by using c4f8 in
a DRIE-tool. I was wondering if any of you have any
recommendation for this process such like annealing, surface
treatment, etc. Does anybody know the maximum temperature
that these layers can resist?. For my process also I need
to soak my samples in Acetone. I just do not know what
would be the effect that this may cause in the PTFE layers.
Regards,
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D
Eric J. Correa Rivera
Graduate Student
Mechanical Engineering
University of Illinois at Urbana Champaign
"Nunca dejes de sonre=EDr, ni siquiera cuando est=E9s triste, porque =
nunca
sabes quien se puede enamorar de tu sonrisa"
Gabriel Garc=EDa =
Marquez
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=
=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D=3D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