Sungjun,
                One factor to consider is that Ti oxidizes rapidly in
air.
Like Si or Al, it forms a self-limiting native oxide of a few tens of
Angstroms within minutes of exposure to air. Maybe this oxide interferes
with the evaporation process.

Regards,
Pierre x286

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Sungjun Lee
Sent: December 6, 2004 17:35
To: mems-talk@memsnet.org
Subject: [mems-talk] [q]e-beam evaporator power

Dear members,

I'm a graduate student of Physics.
I would like to know about the mechanism of power in the electron beam
evaporator.
We made a simple e-beam evaporator for metallization (Ti, Pt, and Pd)
using 1mm diameter metal rod in the lab.

As you may know well, the emission current determine the power in the
evaporator.
Strangely, I found the emission current of Ti is higher than that of Pd
to get the same evaporating rate,
even though the melting point of Ti is less than that of Pd .
In my experience in MEMS instruments, the emssion current of Ti is very
lower than that of Au.
Could you how to explain this fact?

As another question, I would like to know the behavior of metal rod
(source).
In the Pt case, the droplet was formed on top of the rod in evaporating.
But Ti rod was bent after evaporating and Pd was formed the needle shape
like SPM tip.
Does anyone know about these things?

Thank you in advance.

Lee




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