Dear Jacob
Let me know if you need some reprints

1)A. Valentini, F. Quaranta, M. Rossi, L. Vasanelli "Structural
properties of ZnO films prepared by r.f. sputtering for optical
applications" Thin Solid Films vol.175 (1989) p.255
2)A. Valentini, F. Quaranta, L. Vasanelli "Dielectric zinc oxide films
characterization for optical waveguide" Proceeding SPIE vol.1125 " Thin
Film in Optics" (1989) p.36
3)G. Sberveglieri, P. Nelli, S. Groppelli, A. Valentini, F. Quaranta,
L.Vasanelli "Oxygen gas sensing characteristics at ambient pressure of
undoped and Li doped ZnO sputtered thin films" Material Science and
Engeenering B vol.7 (1990) p.63
4)A. Valentini, F. Quaranta, L. Vasanelli, R. Piccolo "Optical
properties of Li doped ZnO films" Proceeding SPIE vol.1400 "Optical
Fabrication and Testing" (1990) p.164
5)A. Valentini, F. Quaranta, M. Rossi, C.Battaglin "Preparation and
characterization of Li doped ZnO films" Journal of Vacuum Science and
Technology A vol.9 n.2 (1991) p.286
6)G. Sberveglieri, S. Groppelli, P. Nelli, F. Quaranta, A. Valentini, L.
Vasanelli "Oxygen gas sensing characteristics for ZnO(Li) sputtered thin
films" Sensor and Actuators B, vol. 7 (1992) p.747
7)F. Quaranta, A. Valentini, F.R. Rizzi, G. Casamassima "Dual ion beam
sputter deposition of ZnO films" Journal of Applied Physics vol.74 n.1
(1993) p.244
8)A. Valentini, F. Quaranta, M. Penza, F.R. Rizzi "The stability of zinc
oxide electrodes fabricated by dual ion beam sputtering" Journal of
Applied Physics vol. 73 n.3 (1993) p.1143

Fabio Quaranta
CNR - IMM Sezione di Lecce
Campus Universitario
Via Monteroni
73100 LECCE
ufficio +39 0832422505
lab +39 0831508544
fax +39 0832422552
cell +39 3480525118
e-mail fabio.quaranta@imm.cnr.it
          fabio.quaranta@le.imm.cnr.it


-----Messaggio originale-----
Da: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
Per conto di Pchome
Inviato: martedì 7 dicembre 2004 5.46
A: mems-talk@memsnet.org
Oggetto: [mems-talk] ZnO sputtering

Does anyone know the parameter of sputtering ZnO?

Thanks in advance.
Jacob Yeh
Dept. Mech. Eng.
University of British Columbia
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