Hi
ZnO sputtering parameters are available in the following paper:

Feasibility study of RF sputtered ZnO film for surface micromachining  •
ARTICLE
In Press, Corrected Proof, Available online 25 November 2004
Vivekanand Bhatt, Prem Pal and Sudhir Chandra
SummaryPlus | Full Text + Links | PDF (294 K)
Prem Pal
Centre for Applied Research in Electronics (CARE)
I.I.T. Delhi


On Tue, 07 Dec 2004 Pchome wrote :
>Does anyone know the parameter of sputtering ZnO?
>
>Thanks in advance.
>Jacob Yeh
>Dept. Mech. Eng.
>University of British Columbia
>_______________________________________________
>MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
>options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
>Hosted by the MEMS Exchange, providers of MEMS processing services.
>Visit us at http://www.memsnet.org/