Dear Group,
How can I measure the surface of  "Black Silicon" It is made by a
SF6/CF4 process
with a ICP etcher. The "Black Silicon" is formed by spikes (250nm thick
and 5µm high)
Yours sincerely
Jens Tuchscheerer




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Jens Tuchscheerer
CLONDIAG chip technologies GmbH
Loebstedterstr. 103-105
07749 Jena
Tel.: +49 3641 59470
Fax.: +49 3641 594720
Mail: jens@clondiag.com
Web: www.clondiag.com

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