durusmail: mems-talk: how to etch SiN mask by wet etching?
how to etch SiN mask by wet etching?
2005-01-13
2005-01-13
2005-01-13
2005-01-13
2005-01-16
how to etch SiN mask by wet etching?
Isaac Wing Tak Chan
2005-01-13
Dear LeiNie,

I would prefer to use BHF solution at room temperature with 20:1 volume
ratio of NH4F to HF.


Yours sincerely,

Isaac Chan
University of Waterloo

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