durusmail: mems-talk: wafer bonding
Photoresist pattern on PDMS
2005-01-04
2005-01-05
2005-01-19
2005-01-20
wafer bonding
2005-01-20
2005-01-21
2005-02-03
wafer bonding
li cai
2005-01-20
My research requires bond wafer 1 to wafer 2, mechanical thin wafer 1 to 100
um, and then debond the wafers.  Does anyone know a good bonding agent?

Thanks,

Li Cai



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