durusmail: mems-talk: Anodic bonding Glass/SOI/Glass
Anodic bonding Glass/SOI/Glass
2005-01-21
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Anodic bonding Glass/SOI/Glass
John Kubby
2005-01-21
Hi,

I would like to bond anodically a SOI wafer with two
glass plates. How I should proceed ? Does the buried
oxide bring problems in the set-up of bonding ?
Is there any problems with the released structures ?
What are the hints to avoid sticking of the structures
?
Thanks,

John

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