[mems-talk] HfO2 removal

durusmail: mems-talk: HfO2 removal

Unstable Plasma - Dry Etching

2005-01-20

William Lanford-Crick

2005-01-20

Isaac Wing Tak Chan

2005-01-21

William Lanford-Crick

2005-01-21

Robert Lindegren

2005-01-21

Frank Torregrosa

HfO2 removal

2005-01-25

rmk111@rsphysse.anu.edu.au

2005-01-20

BobHendu@aol.com

2005-01-21

2005-01-25

Blunier, Stefan

HfO2 removal

rmk111@rsphysse.anu.edu.au

2005-01-25

 Hi
Can anyone advise me how to remove thin film of HfO2
from glass substrate.
Thanks Maryla