durusmail: mems-talk: anti stiction coating
anti stiction coating
2005-01-28
2005-01-28
deposit TaN for Cu barrier
2005-01-30
2005-01-29
anti stiction coating
Amani Salim
2005-01-28
Dear colleagues,

I think this question was posted in MEMS discussion quite some times ago,
but anyway,does anyone have a suggestion on how to avoid sticking of PDMS
to a silicon mold after it is cured? I usually used a sacrificial layer of
PR on the mold, then use acetone to remove the acetone thus removing the
PDMS, however, its not that good! I know that there should be an
anti-stiction soln, but wondering if theres any quick method. Any
suggestions would help, esp those who deal a lot with microcontact
printing/soft lithography, thanks!

Amani Salim

reply