durusmail: mems-talk: Anodic bonding Glass/SOI/Glass
Anodic bonding Glass/SOI/Glass
2005-01-21
2005-01-23
bubbles in microfluidics
2005-01-23
2005-01-28
2005-01-24
Anodic bonding Glass/SOI/Glass
Kirt Williams
2005-01-28
I've anodically bonded Pyrex 7740  to one side of a homemade SOI  wafer (400
um Si, 1 um oxide, 400 um Si).
It worked fine.
I think the oxide conducts sufficiently at the bonding temperature (~400 C)
to not cause a problem.
    --Kirt Williams

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