durusmail: mems-talk: anti stiction coating
anti stiction coating
2005-01-28
2005-01-28
deposit TaN for Cu barrier
2005-01-30
2005-01-29
anti stiction coating
Natalya
2005-01-29
 Hi Amani,

Self-assembled monolayers (SAMs)are widely used as an anti-stiction coating
for MEMS, microcontact printing and other applications. Applied
Microstructures manufactures a tool for SAMs deposition in a vapor phase.
We also developed some special techniques to make release layers more
durable. You may contact me for further information and arrange some
demonstration experiments.

Boris Kobrin
(408) 594-0654
boris_kobrin@appliedmst.com
www.appliedmst.com

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