Hi Amani, Self-assembled monolayers (SAMs)are widely used as an anti-stiction coating for MEMS, microcontact printing and other applications. Applied Microstructures manufactures a tool for SAMs deposition in a vapor phase. We also developed some special techniques to make release layers more durable. You may contact me for further information and arrange some demonstration experiments. Boris Kobrin (408) 594-0654 boris_kobrin@appliedmst.com www.appliedmst.com