durusmail: mems-talk: wet etchant etches Ti not Alumina?
wet etchant etches Ti not Alumina?
2005-01-25
2005-01-30
wet etchant etches Ti not Alumina?
Aegis Liang
2005-01-30
How about pad oxide etchant?
It protects aluminum while etching oxide
But I am not sure that it works fine on alumina

Liang

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