Hi folks

Does anyone have a good recipe for tungsten wet etching? What we are trying
to do is etch through a 25um tungsten foil. At the moment we are using 30%
H2O2 in 50C temperature and that does the job in about  two hours. The only
problem is finding a suitable, patternable and preferably easily strippable
masking material for this process. Any suggestions or ideas are highly
appreciated.

Tomi Meilahti
tomi.meilahti@oxinst.fi