Hi,
try free  ACES   http://galaxy.micro.uiuc.edu/research/completed/aces/
or IntelliSuite package.

Regards

Pawel

On 2005-02-17 at 15:50 Yi Yao wrote:

>Any recommendation for wet etch simulators (academic use)? I'll do
>some research on wet etch simulation and modeling, espeically on
>copper wet etching.