Hi,

We're interested in making sub-micron grating structures on gold. Does
anyone have experience with etching fine features on metal? We're
looking at several hundred nanometers in the lateral dimension (and
probably a micron in the vertical). I don't believe a wet etch will
achieve the required resolution.

Thanks for any help!

Patrick Lu
Department of Electrical Engineering
Stanford University
http://www.stanford.edu/~patlu