durusmail: mems-talk: TiN and TaN
etching fine (hundreds of nanometers) features on metal?
2005-02-28
TiN and TaN
2005-03-01
2005-03-01
2005-03-02
TiN and TaN
Suhua Jiang
2005-03-02
TaN's adhesion is better when used in copper based interconnection

>In Si device fabrication, TaN has been used as an insulating layer to
>seperate Cu from Si.  Does anyone know the reason of using TaN as an
>insulating layer, instead of TiN?

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