durusmail: mems-talk: glass-glass bonding
glass-glass bonding
2005-03-04
glass-glass bonding
Aegis Liang
2005-03-04
Hello,

    UV curable adhesives can do this job. Bonding can be performed in room temp.
    under UV light exposure, and some of them are compatible for
medical purposes.

    But it will be a challenge to apply adhesive which can not be
patterned by lithography.
    Stamping or spin coating might work in some cases

Liang

reply