durusmail: mems-talk: Reliability of Ti-Au metal stack
Reliability of Ti-Au metal stack
TaN etching
2005-03-09
unexpected electorplating
2005-03-23
Reliability of Ti-Au metal stack
Krasniansky Vladimir
2005-03-09
Hi all,
 Did anyone know about reliability problems when Ti-Au films used for
GaAs metalization?
Diffusion, self induced corrosion or something like this?
 vovakr@elta.co.il

Sincerely,

Vladimir Krasniansky.

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