durusmail: mems-talk: Reliability of Ti-Au metal stack
Reliability of Ti-Au metal stack
TaN etching
2005-03-09
unexpected electorplating
2005-03-23
Reliability of Ti-Au metal stack
CY Hsieh 謝吉勇
2005-03-11
I don't know the reliability issue caused by Ti-Au stack.
But I know that Ti/Au, Ti/Pt/Au...etc. is very popular for GaAs
microwave device fabrication for years.

C.Y.

reply