Dear All:
   I need a 5um or thicker photoresist pattern.since 1827 can give 3um thick, I
plan to double coat . the smallest linewidth is 3um, How the expose and
development time change? Could you give me some suggestions on how to produce
5um positive PR ? than you very much.
Jason
xxl141@PSU.EDU
716-5872761
Pennstate University