durusmail: mems-talk: PECVD PolySi Deposition
PECVD PolySi Deposition
PECVD PolySi Deposition
Isaac Wing Tak Chan
2005-03-18
It may mean Al-Induced-Crystallization. Just a guess.

Isaac

On Mon, 14 Mar 2005, Michael D Martin wrote:

> Hi Li,
>    What is AIC anneal?

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