durusmail: mems-talk: the problem of etchnig Cr/Cu
the problem of etchnig Cr/Cu
2005-03-18
Cheng Ming Lin
2005-03-18
Kirt Williams
how to protect viton o-ring from plasma?
2005-03-20
Andrew Xiang
the problem of etchnig Cr/Cu
Kirt Williams
2005-03-18
Use CR-14 to remove your Cr adhesion layer instead of CR-7.
The CR-14 will probably undercut your Cu a lot less.
    --Kirt Williams
reply