durusmail: mems-talk: Cleaning Si3N4 / SiO2 Surface
Cleaning Si3N4 / SiO2 Surface
Cleaning Si3N4 / SiO2 Surface
garber@engr.uconn.edu
2005-03-29
August,

Any resist stripper or O2 plasma should do the job.  If O2 plasma takes too
long I wonder what is the organic you are trying to remove.  I also wonder
why you fear that you will oxidize an oxide

Brent

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