Isaac,

I need to have the sidewalls at angle ~85 degrees or lower to help the
processing steps that follow. You are correct in saying that the angle has a
variance over the wafer. I was just wondering if someone out there found a
blended Bosch recipe, or a regular bosch process, that is able to generate a
sidewall angle of 85 degrees at or just below room temp? That's all. Thanks
for the help.

Bruce Altemus
University at Albany