durusmail: mems-talk: Al thermal evoporation
Al thermal evoporation
2005-04-02
2005-04-03
2005-04-04
2005-04-04
2005-04-04
Al thermal evoporation
Yeswanth Rao
2005-04-03
Hi,

You could use E-Beam Evaporation and may also try a slow rate of evaporation
for better uniformity and adhesion. We are able to deposit very thick layers
of aluminum (usually around 6 micron) by E-Beam Evaporation. Good Luck!

Yeswanth L Rao

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