durusmail: mems-talk: Aluminium deposition
Aluminium deposition
2005-04-04
2005-04-10
Aluminium deposition
RAY
2005-04-04
hello all,
can anybody guide me how to deposit 1micron thick Aluminium on an oxidized
silicon wafer.
i am using thermal evoporation for the same but getting only  50nm thick layer.
your help will be highly appreciated.
thanks
regards
ray


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