The amount you deposit is dependant upon the size of the boat or other that holds the aluminum. You can deposit as much as you like by doing repeated runs, but for a one time deposition without breaking vacuum, you need a large source. If you are using boats, you can buy crucible holders that mount in like a boat which give you more source material capacity. You need to give more info on the evaporation system though. In short yes, you can deposit however much you want, but in a single run it will depend on your source size. Joe Lonjin Penn State Nanofabrication Facility >is it posible to deposit 1 micron thick aluminium layer by thermal >evoporation.