durusmail: mems-talk: Re: Minimum thickess of a Si membrane
Re: Minimum thickess of a Si membrane
2005-04-06
Re: Minimum thickess of a Si membrane
Marco Doms
2005-04-06
Hi,

depending on your HBC module, you can decrease the helium pressure in your
recipe. If that is not possible, you are still using an HBC1 module; in
this case the only possibility is to use a wafer to mount your sample on
(by glue or photoresist). You can also try decreasing the helium pressure
manually on the HBC module.

Marco

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