I have found the attached papers to be interesting.

See also this book (especially Chap. 5, Copper in Inorganic
Dielectrics):

Copper-Fundamental Mechanisms for Microelectronic Applications
Shyam P. Murarka, Igor V. Verner, Ronald J. Gutmann
ISBN: 0-471-25256-5
Hardcover
337 pages
March 2000

All these pertain to copper. I have not found much about gold diffusion
in dielectrics.

RE the detection of surface metal contamination control: TXRF is
excellent. See for example:

http://www.rigakumsc.com/semi/3750S.html

BTW, if you find any other interesting paper or book on Cu diffusion in
dielectrics, I would be grateful for the information.

Best regards,

Pierre Huet