durusmail: mems-talk: Tantullum Nitride Diffusion Barrier Testing
Tantullum Nitride Diffusion Barrier Testing
2005-04-13
ICPCVD
2005-04-13
Coventorware
2005-04-14
2005-04-13
2005-04-15
2005-04-18
Tantullum Nitride Diffusion Barrier Testing
PATEL JITENDRA
2005-04-13
Hello Everyone,

I am working on TaN Diffusion Barrier film. I was wondering if anyone
has paper on testing the fim. Please give me some idea on how i can test
my barrier film.  Thank you.

Jitu


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