durusmail: mems-talk: Adhesion for Al
Adherence of Ti/Au films
2005-04-10
2005-04-11
2005-04-14
2005-04-11
2005-04-11
Adhesion for Al
2005-04-14
2005-04-14
2005-04-14
2005-04-15
2005-04-15
Adhesion for Al
walter@elume.com
2005-04-14
10000 A in one min or approx 200 A sec
Kind Regards
Walter
www.elume.com

-----Original Message-----
From: Andrew Xiang [mailto:xiang@gratingworks.com]

What is a good evap or ebeam rate for depositing 1500A Al?
Is it better to go slow or fast?1-10A/s or 50-100A/s?



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