I think that at this high rate you cannot have
a good control for the thickness of the layer!
For heat evaporation, better going for 1-5 A/s;
with e-beam we are esperiencing some problems for Al,
so I cannot give you details.
Paolo

> 10000 A in one min or approx 200 A sec
> Kind Regards
> Walter
> www.elume.com
>
> -----Original Message-----
> From: Andrew Xiang [mailto:xiang@gratingworks.com]
>
> What is a good evap or ebeam rate for depositing 1500A Al?
> Is it better to go slow or fast?1-10A/s or 50-100A/s?