durusmail: mems-talk: Sputtering of silicon on glass
Sputtering of silicon on glass
1998-01-22
Sputtering of silicon on glass
will bouts
1998-01-22
Does anybody have experience with RF-sputtering of silicon on
(quartz)glass and/or metals (e.g. Al, Cu, Cr).
My biggest problem is adhesion of silicon on the above mentioned
substrates.

Does a web site exist that is especially dealing with RF-sputtering?

Thanks in advance,

Will. Bouts.


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