A wagon wheels patterns is a term referred to when not enough resist is
applied to the wafer. There are spikes at the edge of the wafer, where no
resist exists.  This makes the wafer resemble a wagon wheel. How many and
how big depends on how bad the problem is.

Robert

-----Original Message-----
From: Duan
Subject: [mems-talk] Could someone tell me where I can get some
information about wagon wheel pattern?

Such as how big are those spikes? and how many spikes are included in
one wagon wheel pattern? and normally how deep will going to be
etched?