Does the DLC survive the KOH etch?  Can the DLC serve as an etch mask
for KOH etch?

-----Original Message-----
From: Nikhil Mehta
Subject: RE: [mems-talk] is there anything else replacing SiO2 or Si3N4
forSietch mask (KOH)?

yes... Brewer protex works great and we have used it.. to protect
against KOH .. it gets removed with acetone.. however if you have small
dies and not the wafer it did not work.. we used room temp PECVD process
to grow hydrogenated DLC as etch stop in that....
 case