Hi,
Have you considered the initial stress in the aluminum layer? That may
be one of the causes to bend the structure.
Best
Leo

On 4/18/05, Ramesh Narayanan  wrote:
> Hi,
> I have fabricated array of mico cantilevers using aluminum. dimension are
> length=300um, width=200um, height=2um.(air gap3-4um) i am using sacrificial
> material and washing it away to free the cantilever. But most of the
> cantilevers have collapsed. I have also calculated the bending due to its
> own weight and i am getting answer in nanometers. Is this happening because
> of the E(Al)=70GPa or dimension is too large and collapsing due to its
> ownweight? Or am i making calculation mistake?
> I would really appreciate if you guys could answer my question.