Hi Ramesh-

Your stiction is likely the result of surface tension forces that arise due
to the your cantilevers drying at atmosphere and crossing the phase boundary
from liquid to a gas in this state. Critical Point Drying will eliminate
this problem.

We have a broad range of CPD solutions for this type of problem and you may
contact me direct for additional information.

Best Regards-
Yianni

----- Original Message -----
From: "Ramesh Narayanan" 
Subject: [mems-talk] cantilever bending problem ?

> I have fabricated array of mico cantilevers using aluminum. dimension are
> length=300um, width=200um, height=2um.(air gap3-4um) i am using
> sacrificial
> material and washing it away to free the cantilever. But most of the
> cantilevers have collapsed. I have also calculated the bending due to its
> own weight and i am getting answer in nanometers. Is this happening
> because
> of the E(Al)=70GPa or dimension is too large and collapsing due to its
> own weight? Or am i making calculation mistake?