Nakhil,

Can you give a more specific reference on the DLC etch stop.  Massi's
first name would help in searching.

Thanks
Roger Shile


-----Original Message-----
From: Nikhil Mehta
Subject: RE: [mems-talk] is there anything else replacing SiO2 or
Si3N4forSietch mask (KOH)?

Hi Roger,

we have done DLC as mask for our dies .. and it worked great.. it
survied KOH etch.. there are some papers by Massi and his group on
hydrogenated DLC as etch stop..