Hi Mojgan Cr will oxidize and nitridise in an un-controlled fashion - you want be able to get consistent results Shay -----Original Message----- From: Mojgan Daneshmand Subject: [mems-talk] Cr as resistor I need to deposit a resistive layer for an RF circuit. My main circuit is from gold and we use Cr as adhesive layer. I was wondering if I can use this Cr layer as resistive layer for biasing the RF circuit?? I looked on the web, it seems no one is using Cr as resistors and everyone is using it in the form of a mixture.