durusmail: mems-talk: Cr as resistor
Cr as resistor
Cr as resistor
Shay Kaplan
2005-04-20
Hi Mojgan
Cr will oxidize and nitridise in an un-controlled fashion - you want be able
to get consistent results

Shay

-----Original Message-----
From: Mojgan Daneshmand
Subject: [mems-talk] Cr as resistor

 I need to deposit a resistive layer for an RF circuit. My main circuit is
from gold and we use Cr as adhesive layer. I was wondering if I can use this
Cr layer as resistive layer for biasing the RF circuit?? I looked on the
web, it seems no one is using Cr as resistors and everyone is using it in
the form of a mixture.
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