Hi Ramesh,

If you can live with SiO2 as sacrificial layer we can offer you a quasy
dry HF Vapor Phase Release process for aluminium structures as well as
equiment to do the process.

For more information contact me directly at info@idonus.com.

Regards
Christian Spoerl

-----Original Message-----
From: Ramesh Narayanan [mailto:nsnramesh@gmail.com]
Subject: [mems-talk] cantilever bending problem ?

I have fabricated array of mico cantilevers using aluminum. dimension
are
length=300um, width=200um, height=2um.(air gap3-4um) i am using
sacrificial
material and washing it away to free the cantilever. But most of the
cantilevers have collapsed. I have also calculated the bending due to
its
own weight and i am getting answer in nanometers. Is this happening
because
of the E(Al)=70GPa or dimension is too large and collapsing due to its
own weight? Or am i making calculation mistake?